The TESCOM 12 Series is a miniature ultra high purity IGS/VCR pressure reducing regulator. The 12 Series offers 5 Raor 10 Ramicroinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 250 mm Hg-15, 30, 60, 100 psig / 250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM.
Relevant Industries :
- Microelectronics
Applications:
- OEM Tools
- Gas Boxes
- Low-Pressure Gas Cabinets