The TESCOM 64-5400 Series high purity pressure reducing regulator provides 316 Stainless Steel with Electropolish, 10 Rasurface finish and Hastelloy® diaphragm design. The 64-5400 Series offers high flow Cv = 1.0 and inlet pressure of 600 psig / 41.4 bar with outlet pressures up to 150 psig / 10.3 bar.

Relevant Industries

• Microelectronics

Applications

• Bulk Specialty Gas Systems (BSGS)
• 1/2″ point-of-use
• Tool hookups
• Gas cabinets